Citation
Mj. Schoning et al., Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors, SENS ACTU-B, 65(1-3), 2000, pp. 288-290
Citations number
8
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005
→ ACNP
Volume
65
Issue
1-3
Year of publication
2000
Pages
288 - 290
Database
ISI
SICI code
0925-4005(20000630)65:1-3<288:NESWSA>2.0.ZU;2-9
Abstract
Novel electrochemical sensors with structured and porous semiconductor/insu
lator capacitors, which allow an efficient miniaturization, have been devel
oped. These sensors have been prepared using standard techniques of semicon
ductor processing. Both sensor types exhibit a high, near-Nernstian pH sens
itivity of about 54 mV per decade. Due to the enlargement of the active sen
sor area, the measured capacitance values increase up to a factor of 30. (C
) 2000 Elsevier Science S.A. All rights reserved.