EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures

Authors
Stoger, M Nelhiebel, M Schattschneider, P Schlosser, V Breymesser, A Jouffrey, B
Citation
M. Stoger et al., EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures, SOL EN MAT, 63(2), 2000, pp. 177-184
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SOLAR ENERGY MATERIALS AND SOLAR CELLS
ISSN journal
09270248 → ACNP
Volume
63
Issue
2
Year of publication
2000
Pages
177 - 184
Database
ISI
SICI code
0927-0248(20000701)63:2<177:EMOPST>2.0.ZU;2-S
Abstract
The aim of this work is the quantitative chemical analysis of polycrystalli ne silicon thin films grown on glass substrates at temperatures < 600 degre es C by means of transmission electron microscopy (TEM) and electron energy -loss spectrometry (EELS). Specimens produced with two different methods we re investigated. We found significant differences in grain size and morphol ogy, as well as in the distribution of oxygen. A surprisingly high amount o f Pa diffusion from the subtrate was detected. (C) 2000 Published by Elsevi er Science B.V. All rights reserved.