The increase in open-circuit voltage (V-oc) due to light soaking was invest
igated in amorphous silicon solar cells. The light-induced increase in V-oc
appears when i-layers are prepared in H-2-diluted plasma (H-2/SiH4 > 10).
It is necessary that more than two-thirds of the i-layer thickness be forme
d under such hydrogen dilution. This phenomenon is not related to p/i inter
face effects but reflects the bulk properties of the dilution layer. The in
crease in V-oc is caused by the voltage shift of dark I-V characteristics.
The change of V-oc is determined by the balance between the shift of dark c
urrent and the reduction of photocurrent due to the light-induced defects.
The voltage shift suggests an increase in the diode barrier height of the p
in junction; however, the increase in built-in potential in the active laye
rs (i-layers) is not observed in our experiments. The advantage of this eff
ect is seen with sufficiently thin i-layers, because conventional light-ind
uced degradation is negligible. The increase in V-oc improves conversion ef
ficiency by 2% after light soaking in the case of 500 Angstrom i-layers.