Hybrid Monte Carlo - fluid model for a microsecond pulsed glow discharge

A hybrid model is developed for a microsecond pulsed analytical glow discha rge. It consists of a Monte Carlo model for the fast electrons, a fluid mod el for the slow electrons and argon ions, coupled to Poisson's equation for the electric field calculation, and a Monte Carlo model for the fast argon ions and atoms in the cathode dark space (CDS). Typical results of this mo del include the electrical characteristics (i.e., potential, current, power , as well as the gas temperature), the electric potential distributions, th e argon ion density profiles, and the rates of various ionization and recom bination mechanisms. These results are presented as a function of time duri ng and after the pulse. Comparison with experimental data has been made for the electrical characteristics (for which experimental data were available ), and good agreement has been reached. This suggests that the other calcul ated quantities, for which no experimental data are available, are also cor rectly predicted in the model.