Thermodynamic analysis of GaxB1-xN grown by MOVPE

A thermodynamic model was applied to predict the GaBN MOVPE growth such as the equilibrium partial pressures, vapor-solid distribution relation, and g rowth efficiency. The delta-lattice-parameter (DLP) method was employed to determine the activities of the binary compounds. The large structural diss imilarity between BN and GaN results in a high interaction parameter of 707 30cal/mol, indicating that GaBN deviates greatly from an ideal solid soluti on. A V/III ratio > 100 is required for the growth of GaBN at 1000 degrees C to avoid Ga droplets on the growth front. The growth of GaBN is controlle d by the much higher Ga partial pressure than that of B over the alloy. The unstable regions in which inhomogeneous compositions are formed exist in t he GaBN alloy based on the vapor-solid distribution relation. The predicted growth behavior of GaBN agrees well with the experimental data. (C) 2000 P ublished by Elsevier Science B.V. All rights reserved.