Surface modification of ceramic materials using excimer laser

Changes of surface morphology following XeCl excimer laser irradiation were investigated for three engineering ceramic materials (Al2O3, Al2O3-SiC nan ocomposite and Si3N4) Al2O3 and Al2O3-SiC nanocomposite samples exhibit a s mooth rapid melt layer on the surface, and the formation of the metastable gamma-Al2O3 was observed. A silicon-rich layer on the surface was formed af ter laser irradiation of Si3N4. The toughness K-1c of the materials was mea sured by the indentation fracture method. After laser irradiation, the toug hness of Al2O3, Al2O3-SiC nanocomposite and Si3N4 was improved to various d egrees: Al2O3-SiC nanocomposite, 60% (max.); Al2O3, 40% (max.); Si3N4, 12% (max.).