Phase development of radio-frequency magnetron sputter-deposited Pb(Mg1/3Nb2/3)O-3-PbTiO3 (90/10) thin films

Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PMN-PT) films were deposited by the radio-frequen cy magnetron sputtering technique with Pb- and Mg-enriched ceramic targets. The perovskite structural growth was carried out over a wide range of proc essing parameters, PMN-PT targets were synthesized by the columbite techniq ue. Surface cracking was due to the residual stress induced by low-temperat ure deposition. To reduce the surface-layer delamination, the substrate tem perature during deposition was increased to 500 degrees C. Even though the amount of the perovskite phase decreased, the surface morphology was free o f macrodelaminations and better than the case of room-temperature depositio n. By stress releasing, high-temperature deposition reduces the delaminatio ns of the PMN-PT thin films on the Pt/Ti/SiO2/Si substrate. By controlling the sputtered-particle kinetic energy and the film composition, the surface morphologies were changed to be smooth and delamination-free. (C) 2000 Ame rican Vacuum Society. [S0734-2101(00)13204-X].