Ag(100) homoepitaxy constitutes one of the simplest systems in which to stu
dy thin-film growth. Yet we find that the roughness variation with temperat
ure is extraordinarily complex. Specifically, as the deposition temperature
is reduced from 300 to 50 K, the roughness of 35 monolayer films first inc
reases, then decreases, then increases again. A transition from mound forma
tion to self-affine (semifractal) growth occurs at similar to 135 K. The un
derlying mechanisms are postulated. An atomistic model incorporating these
mechanisms reproduces the experimental data quantitatively.