Photolithographic manufacture of a superconducting levitation coil on a spherical substrate

Authors
Trenkel, C Hammond, GD Speake, CC
Citation
C. Trenkel et al., Photolithographic manufacture of a superconducting levitation coil on a spherical substrate, PRECIS ENG, 24(2), 2000, pp. 139-145
Citations number
11
Categorie Soggetti
Instrumentation & Measurement
Journal title
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY
ISSN journal
01416359 → ACNP
Volume
24
Issue
2
Year of publication
2000
Pages
139 - 145
Database
ISI
SICI code
0141-6359(200004)24:2<139:PMOASL>2.0.ZU;2-P
Abstract
We have developed a photolithographic method to pattern a superconducting l evitation coil made from Pb on a spherical MACOR substrate. The cross secti on of the windings is approximately 150 x 40 mu m, and a typical coil consi sts of 70 windings with a minimum pitch of 350 mu m The substrate radius is about 4 cm, and the coil extends from 15 to 60 degrees in polar angle. We present the manufacturing process and suggest future improvements. (C) 2000 Elsevier Science Inc. All rights reserved.