Secondary ion mass spectrometric investigation on ruthenium oxide systems:a comparison between poly- and nanocrystalline deposits

The influence of different RuO2 crystallite sizes was investigated by secon dary ion mass spectrometry (SIMS) on the oxide deposited on various support materials (Ni, Ti, Al2O3, oxidized Si(100)), In order to examine the effec t of an oxidic environment on the him structure, RuO2 20 % -TiO2 80% at. mi xed oxide was deposited on Ti, The polycrystalline coatings were prepared b y heating the Ru (and Ti)-containing solution dropped on the supports.(1) R uO2 nanocrystalline coatings were grown by chemical vapor deposition (CVD) from Ru(COD)(eta(3)-allyl)(2).(2) The identification of mixed oxide cluster s showed the higher reactivity of Ni and Al2O3 over the other substrates, D iffusion and migration characteristics were observed to be influenced by th e nature of the support. The results are complementary to those of a previo us SIMS investigation.(3) Copyright (C) 2000 John Wiley & Sons, Ltd.