High selective and sensitive thick-film methane sensors were fabricated and
their sensing characteristics for various hydrocarbon gases were investiga
ted. SnO2/Au was prepared by coprecipitation method. SEM, TEM, BET and XRD
analyses were carried out for investigation of surface morphology and cryst
alline structure. Pd-added SnO2/Au thick-film devices exhibited high sensit
ivity to methane gas at operating temperature of 400 degrees C. The sensiti
vity of SnO2/Au + Pd thick-film devices to methane gas was higher than that
of the other gases. The optimal adding amounts of Au and Pd were 1 and 3 w
t.%, respectively. (C) 2000 Elsevier Science S.A. All rights reserved.