c-Si phototransistors with base junction depth around 4.0 mu m with its com
mon emitter DC current gain h(FE) within 300-1100 had been well controlled
by implanting base doping levels from 3 x 10(14) to 6 x 10(14) cm(-2), whic
h is suitable in any conventional commercial photosensing application. Acco
rding to the experimental results, the higher the base doses implanted, the
lower and more stable is the DC current gain h(FE) obtained. The higher ba
se implanting doping level results in reproducible and uniform wafers. The
common emitter open base breakdown voltage BVCEO ranges from 35 V (for ligh
tly doped base) to 140 V (for heavier doped base) under the test condition
of I-CEO = 100 mu A, and the collector-emitter leakage current for base cur
rent I-B = 0. The open emitter breakdown voltage is within 40 V for lightly
doped base, similar to 220 V for heavier doped base under I-CBO = 100 mu A
and I-E = 0 A. The breakdown mechanism includes punch through and avalanch
e multiplication. (C) 2000 Elsevier Science Ltd. All rights reserved.