Gf. Niu et al., Cryogenic temperature non-scaling of linear resistance in n-MOSFETs exhibiting reverse short-channel effect, SOL ST ELEC, 44(8), 2000, pp. 1507-1509
An enhancement of the non-scaling of the linear resistance with channel len
gth is observed at low temperatures, despite reduced reverse short channel
effect. This imposes a significant limitation on the low temperature operat
ion of deep submicron CMOS devices. An increased surface roughness scatteri
ng in shorter channel devices is suggested to explain the gate overdrive an
d temperature dependence. (C) 2000 Elsevier Science Ltd. All rights reserve
d.