Microstructure of thermal hillocks on blanket Al thin films

Authors
Kim, D Heiland, B Nix, WD Arzt, E Deal, MD Plummer, JD
Citation
D. Kim et al., Microstructure of thermal hillocks on blanket Al thin films, THIN SOL FI, 371(1-2), 2000, pp. 278-282
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
371
Issue
1-2
Year of publication
2000
Pages
278 - 282
Database
ISI
SICI code
0040-6090(20000801)371:1-2<278:MOTHOB>2.0.ZU;2-Y
Abstract
The microstructure of thermal hillocks on blanket Al thin films has been st udied for the first time by several techniques, including sectioning and im aging in a focused ion beam system. It is found that the new material in th e hillock area lifts the original film up and in some cases penetrates it. The micrographs also reveal the grain structures and give valuable insight into the mechanisms of hillock growth. (C) 2000 Elsevier Science S.A. All r ights reserved.