Lateral scanning white-light interferometer

White-light vertical scanning interferometry is a well-established techniqu e for retrieving the three-dimensional shapes of small objects, but it can measure only areas as big as the field of view of the instrument. For bigge r fields a stitching algorithm must be applied, which often can be a source of errors. A technique in which the object is scanned laterally in front o f an instrument with a tilted coherence plane is described. It permits meas urements at higher speeds while measurement accuracy is retained and elimin ates the need for stitching in one direction. Experimental confirmation is provided. (C) 2000 Optical Society of America. OCIS codes: 120.3180, 120.28 30.