The iron di-silicide beta-FeSi2 is a promising direct band gap semiconducto
r but difficult to produce. Here, the successful direct synthesis of this p
hase by ion beam mixing of Fe/Si bilayers at temperatures in the range of 4
50 to 550 degrees C is reported. The obtained single-phase beta-FeSi2 layer
s and their structure are confirmed by Rutherford backscattering spectromet
ry, X-ray diffraction and conversion electron Mossbauer spectroscopy. PACS:
61.80.Jh; 68.55.Nq; 61.82.Fk.