Thin films of beta-In2S3, obtained by physical vapor deposition process fol
lowed by a post-annealing, are studied on bare glass substrates and those c
oated with SnO2, In2O3 and ZnO transparent conductive oxides (TCOs). These
films have an optical band gap of about 2.8 eV, good covering efficiency, a
nd n-type conductivity, making them good candidates for buffer layer in CuI
nSe2 solar cells. The structural, optical and morphological properties of t
hese bilayers have been studied with X-ray diffraction, scanning electron m
icroscopy. X-ray photoelectron spectroscopy depth profiling, and optical tr
ansmission. All results show that our method of synthesis allows us to grow
beta-In2S3 films on glass and TCO-coated glass coated substrates. Moreover
, these films are exempt from pinholes, cracks, or other morphological defa
ults even for very small thickness. (C) 2000 Elsevier Science B.V. All righ
ts reserved.