Study of the extended p(+) dual source structure for eliminating bipolar induced breakdown in submicron SOI MOSFET's

Simulation results on a novel extended p(+) dual source SOI MOSFET are repo rted. It is shown that the presence of the extended p(+) region on the sour ce side, which can be fabricated using the post-low-energy implanting selec tive epitaxy (PLISE), significantly suppresses the parasitic bipolar transi stor action resulting in a large improvement in the breakdown voltage. Our results show that when the length of the extended p(+) region is half the c hannel length, the improvement in breakdown voltage is about 120% when comp ared to the conventional SOI MOSFET's.