We present in this paper an integrated cavity-backed patch antenna operatin
g at 75 GHz. The design was optimized using a full-wave software based on t
he integral-equation method. The antenna was realized using micromachining
technologies on two wafers: a silicon one supporting a membrane and a radia
ting patch and a Pyrex one constituting the feeding element. The measuremen
ts are in good agreement with the theoretical predictions. (C) 2000 John Wi
ley & Sons, Inc.