The effects of laser irradiation on high-temperature superconducting YBa2Cu
3O7-x thin films have been investigated by micro-Raman spectroscopy. Laser
heating affects YBa2Cu3O7-x thin films to varying degrees at different lase
r power levels. For a laser power density below 1 mW mu m(-2), laser irradi
ation causes only thermal expansion within the focused area. When the laser
power density is increased to about 1.7 mW mu m(-2) oxygen out-diffusion o
ccurs. The orthorhombic to tetragonal structural phase transition was obser
ved at 3.1 mW mu m(-2). Above 4.3 mW mu m(-2), chemical decomposition is in
ferred from the appearance of Raman bands due to the impurity phase BaCuO2.
Comparison between the laser-heated results and the furnace-heated results
was made, and the role played by temperature gradient and stress in the la
ser-heated sample is discussed in detail.