With the progress of LSI technology, the electronic device size is scaled d
own to the sub 0.1 mu m region. In such an ultrasmall device, it is indispe
nsable to take quantum mechanical effects into account in device modeling.
In this paper, we present a newly developed quantum Monte Carlo device simu
lation applicable to ultrasmall semiconductor devices. In this model, the q
uantum effects are represented in terms of quantum mechanically corrected p
otential in the classical Boltzmann equation. It is demonstrated that the q
uantum transport effects such as tunneling and energy quantization in ultra
small semiconductor devices are obtained for the first time by using the st
andard Monte Carlo techniques. (C) 2000 Academic Press.