Evaluation of diamond-like carbon films deposited on conductive glass fromorganic liquids using pulsed current

Hydrogenated diamond-like carbon (DLC) films were deposited on conductive g lass substrates from methanol, DMF and acetonitrile by liquid deposition us ing a pulse-modulated source. The structure of the films was characterized by XPS, Raman and IR spectroscopy. XPs showed that the main constituent of the films was carbon. Raman and IR indicated that hydrogen was contained in the films and bonded preferentially to sp(3) sites. From Raman spectra of the films, we found that DLC was formed in most experimental conditions and in some uncertain areas of the films deposited in DMF (1600 V) the diamond peak was also detected. The films had high transmission ratios (> 70%) in the range of 330-2000 nm with VIS/UV spectroscopy. The resistivity of the f ilms was of the order of 10(10) Omega cm. (C) 2000 Elsevier Science S.A. Al l rights reserved.