Epitaxial growth of SiO2 on Mo(112)

Citation
T. Schroeder et al., Epitaxial growth of SiO2 on Mo(112), SURF REV L, 7(1-2), 2000, pp. 7-14
Citations number
44
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
SURFACE REVIEW AND LETTERS
ISSN journal
0218625X → ACNP
Volume
7
Issue
1-2
Year of publication
2000
Pages
7 - 14
Database
ISI
SICI code
0218-625X(200002/04)7:1-2<7:EGOSOM>2.0.ZU;2-G
Abstract
A new preparation is reported which, for the first time, results in a thin, crystalline SiO2 film on a Mo(112) single crystal. The procedure consists of repeated cycles of silicon deposition and subsequent oxidation, followed by a final annealing procedure. AES and XPS have been used to control film stoichiometry. LEED pictures of high contrast show a hexagonal, crystallin e SiO2 overlayer with a commensurate relationship to the Mo(112) substrate. The wetting of the substrate by the film has been investigated by LEED, XP S and TDS, revealing that the film covers the substrate completely.