Wet oxidation of AlAsSb alloys catalyzed by methanol

This paper compares the results obtained from wet oxidation in vapor mixtur e of methanol-water with those from wet oxydation water vapor of AlAsxSb1-x layers in arsenic based structures matched on InP and On InAs subtrates. A ll the structures have been made by molecular beam epitaxy. The quality of the resulting oxide layers (AlOx) were examined by means of scanning electr on microscopy (SEM), secondary ions mass spectrometry (SIMS) and resistance measurements of the structures. The results described in this report demon strate that the addition of methanol into water vapor reduces the amount of antimony and arsenic in the oxidized layers of n-type structures. (C) 2000 Elsevier Science B.V. All rights reserved.