K. Asai et al., Possibility of a quasi-liquid layer of As on GaAs substrate grown by MBE as observed by enhancement of Ga desorption at high As pressure, APPL SURF S, 159, 2000, pp. 301-307
The As vapor pressure dependence of the Ga desorption rate during molecular
beam epitaxy (MBE) growth on GaAs(n11)A (n = 1-4 hereafter) substrates was
studied by photoluminescence (PL) measurements at 12 K for undoped AlGaAs/
GaAs asymmetric double quantum wells (ADQWs). Reflection high energy electr
on diffraction (RHEED) oscillation measurements on a GaAs(100) surface were
also used. Two K-cells of As solid sources (corresponding to beam equivale
nt pressures (BEPs) of 9.0 x 10(-6) and 4.5 x 10(-5) Torr) were used to cha
nge the As pressure rapidly. The Ga flux and substrate temperature were kep
t constant at 0.76 ML/s and 12 K, respectively, while the As flux changed f
rom 7.6 (BEP 9.0 x 10(-6) Tow) to 32 ML/s (4.5 x 10(-5) Ton). With increasi
ng As pressure, two separated PL peaks for the wide well (WW) of high index
substrates were observed. This peak separation is attributed to a reduced
well depth from an increasing Ga desorption rate. The energy differences of
the PL peak depending on the off-angle from (111)A to (100) plane indicate
s an orientation-dependent Ga desorption rate. Moreover, amongst all (n11)A
and (100) planes, the Ga desorption rate was smallest from the (111)A surf
ace. The increase of Ga desorption from the surface at high As pressures pr
obably arose from an increasing coverage with a quasi-liquid layer (QLL). (
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