Control of adsorbates and conduction on CVD-grown diamond surface, using scanning probe microscope

Nanofabrication on a hydrogen-terminated diamond surface is performed by co ntrolling surface adsorbates, using a scanning probe microscope (SPM) techn ique. Insulated areas are successfully obtained by changing hydrogen termin ation to oxygen termination. The Auger electron spectrum (AES) indicated th e presence of oxygen adsorbed on the modified surface area. A small isolate d conductive area is fabricated. and using this structure, a metal-insulato r-metal (MIM) diode-like I-V characteristic is observed. Anodic oxidation u sing the surface water is also suggested for our experimental results. (C) 2000 Elsevier Science B.V. All rights reserved.