Photoelectrochemical etching of silicon using light assistance of vari
ous wavelengths has been studied. As the etching process proceeds, a b
lueshift is noted in the photoluminescence spectra. However, after a c
ertain period of etching, under a fixed current density, a saturation
point is reached, below which no further shift to higher energies is d
etected. This cutoff point occurs at approximately 2 eV, even if a muc
h higher energy irradiant light source is used during the formation pr
ocess. These results provide strong evidence for the surface-state mec
hanism of luminescence and render the pure quantum confinement model u
nlikely. (C) 1997 American Institute of Physics.