LASER CRYSTALLIZATION AND STRUCTURING OF AMORPHOUS-GERMANIUM

The short-pulse laser crystallization and interference structuring of amorphous germanium films were investigated by time resolved reflectio n measurements and Raman spectroscopy, We demonstrate that submicromet er crystalline structures with very sharp lateral interfaces can be pr oduced by laser interference crystallization of nonhydrogenated sample s. In hydrogenated films, on the other hand, the film surface disrupts upon laser exposure leading to the formation of a free-standing cryst alline membrane, The Raman spectra of laser crystallized germanium dis play effects of finite crystallite size and stress. (C) 1997 American Institute of Physics.