Assignments of bending and stretching vibrational spectra and mechanisms of thermal decomposition of SiH2 on Si(100) surfaces

Vibrations of hydrogen-chemisorbed Si(100) surfaces with 3 X 1 and 1 X 1 st ructures were studied by buried metal layer-infrared reflection absorption spectroscopy. The SiH2 bend scissors mode was found to split into two disti nct peaks at 902 and 913 cm(-1); they were assigned to isolated dihydride ( ID) and adjacent dihydride (AD), respectively. The observed differences in the dependence on annealing temperature showed that the small peak near 209 0 and the 2107 cm(-1) peak were assignable to the symmetric stretching mode of ID and less stable AD, respectively. (C) 2000 Published by Elsevier Sci ence B.V.