Total cross sections for electron impact ionization are necessary quantitie
s for numerical modeling of plasma chemistry and for quantitative mass-spec
trometric gas analysis. Theoretical cross sections for SF, SF2, SF3, SF4, a
nd SF5 are calculated by the recently developed binary-encounter-Bethe (BEB
) model. The BEB model combines a modified form of the Mott cross section a
nd the Bethe cross section. The results are compared with experimental cros
s sections for SF3 and SF5 free radicals. In view of the success of the BEB
method for SF6 and many other molecules, it is expected that the results p
resented here will provide reliable total ionization cross sections for SFx
(x = 1-5). (C) 2000 Elsevier Science B.V.