Chemical vapor deposition of Sr1-xBaxNb2O6 thin films using metal alkoxideprecursors

A novel two-step metalorganic chemical vapor deposition process was used in this study to prepare Sr1-xBaxNb2O6 (SBN) thin films. Two thin layers of s ingle-phase SrNb2O6 and BaNb2O6 were deposited alternately on a silicon sub strate, and the solid solution of SBN was obtained by high-temperature anne aling. The stoichiometry control of the SrNb2O6 and the BaNb2O6 thin films was achieved through deposition process control, according to the evaporati on characteristics of double metal alkoxide. The evaporation behavior of do uble metal alkoxide precursors SrNb2(1-OC4H9)(12) and BaNb2(1-OC4H9)(12) wa s studied, and the results were compared with the evaporation of single alk oxide Nb(1-OC4H9)(5).