Stress relaxation effects in Ag/Pd superlattices at initial stages of ion beam mixing

Initial stages of the ion beam mixing process in Ag/Pd multilayers are anal yzed using X-ray diffraction. The interface spread caused by ion irradiatio n is reflected in changes in the relative intensities of satellite superlat tice peaks. Diffraction profiles measured after ion irradiation are interpr eted using computer programs based on a Monte Carlo simulation. The thickne ss of mixed interface regions and interplanar distances of both components of multilayer are determined for each stage of ion irradiation. The determi ned mixing parameter is independent of the multilayer period and of the rel ative concentrations of components. A stress relaxation effect is observed for low ion doses. (C) 2000 Published by Elsevier Science S.A.