Citation
H. Schift et al., Nanoreplication in polymers using hot embossing and injection molding, MICROEL ENG, 53(1-4), 2000, pp. 171-174
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317
→ ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
171 - 174
Database
ISI
SICI code
0167-9317(200006)53:1-4<171:NIPUHE>2.0.ZU;2-E
Abstract
With polymer molding techniques, it is possible to fabricate nanostructures
with a replication fidelity of 25 nanometers . Both hot embossing and inje
ction molding can be used, and cycle times of down to 4 sec can be achieved
in a CD injection molding process. The resolution is far below the structu
re size found today in compact disc memory media. The master structures are
produced by electron beam lithography and subsequent dry etching.