Multifunctional AFM/SNOM cantilever probes: Fabrication and measurements

The microfabrication process for cantilever probes for combined atomic forc e (AFM) and scanning near-field optical microscopy (SNOM) is described. The probes feature an aperture tip with a Si3N4 core for SNOM operation as wel l as an integrated optical waveguide for illumination of the tip. First mea surements have been performed using a home-made AFM/SNOM setup operating in tapping mode with optical beam deflection. A special test sample containin g a pattern of gold nanostructures embedded in a transparent polymer matrix provides low topography but high optical contrast. An optical resolution o f about 100 nm has been demonstrated by examining the contrast in transmitt ed intensity at the metal/polymer border.