A study of multiple scattering effect with 10 kV e-beam system

Multiple scattering effect is discussed with a low voltage e-beam system. A test layout is designed to figur out the multiple scattering effect. A dar k erosion is studied to identify the scattering range. The range i found to be as far as similar to 15mm with our 10kV e-beam system. The effective sc attering doses are 5.6% an 5.3% in terms of CD variation for beam spot size s of 0.15um and 0.3um, respectively. CD variation between: features in non- multiple scattered area and those in multiple scattered is 22nm-31nm that i s not negligible for small features.