Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications

Authors
Rothuizen, H Drechsler, U Genolet, G Haberle, W Lutwyche, M Stutz, R Widmer, R Vettiger, P
Citation
H. Rothuizen et al., Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications, MICROEL ENG, 53(1-4), 2000, pp. 509-512
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
509 - 512
Database
ISI
SICI code
0167-9317(200006)53:1-4<509:FOAMMX>2.0.ZU;2-R
Abstract
This paper presents the fabrication and characteristics of a magnetically a ctuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z , and tilt about the X and Y axes) intended for use as a compact positionin g device in parallel scanning probe applications. The entire scanner has a volume of 30x30x2 mm(3). It shows a DC displacement amplitude to drive curr ent ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis , and has a resonant frequency in the X/Y plane of 61 Hz.