Replication of 3D-micro- and nanostructures using different UV-curable polymers

Authors
Rudschuck, S Hirsch, D Zimmer, K Otte, K Braun, A Mehnert, R Bigl, F
Citation
S. Rudschuck et al., Replication of 3D-micro- and nanostructures using different UV-curable polymers, MICROEL ENG, 53(1-4), 2000, pp. 557-560
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
557 - 560
Database
ISI
SICI code
0167-9317(200006)53:1-4<557:RO3ANU>2.0.ZU;2-G
Abstract
Replica moulding with a curing technique offers the possibility to fabricat e 3D-micro- and nano-structures at low cost and high throughput. We studied the influence of various polymer formulations on the replication of differ ent 3D-structures over a wide range of pattern sizes. The pattern fidelity, the tips and edges as well as the roughness were characterized with regard to the polymer formulations by optical interferometry, atomic force micros copy and scanning electron microscopy.