A micromachined bistable 1 x 2 switch for optical fibers

Using bulk micromachining techniques, a 1x2 optical fiber switch has been f abricated. The optical signal is carried by a standard monomodal fiber. Swi tching is based on asymmetrical Joule heating of a Y-shaped cantilever stru cture by means of two integrated chromium thin film resistors; both electri cal and optical properties are promising. A lock-release mechanism, based o n silicon micromachined hooks, has also been tested. This mechanism allows the fabrication of a mechanically bistable device, that needs electrical po wer only during switching.