A micromachined Xenon flow regulator for space applications

Authors
Diligenti, A Nannini, A Pieri, F Piotto, M Noci, G
Citation
A. Diligenti et al., A micromachined Xenon flow regulator for space applications, MICROEL ENG, 53(1-4), 2000, pp. 565-568
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
565 - 568
Database
ISI
SICI code
0167-9317(200006)53:1-4<565:AMXFRF>2.0.ZU;2-Y
Abstract
A Xenon how regulator based on the dependence of the mass flow from the abs olute temperature of the gas pipeline, is proposed. The device is fabricate d by means of micromachining and has an area of 1 cm(2) and a weight of few grams. The pipeline is integrated on a silicon substrate while the heater is a chromium resistor deposited on the glass cover: silicon substrate and glass cover are bonded together by means of the anodic bonding technique. M easurements of the dependence of the mass flow from the pressure drop and t he absolute temperature are presented and discussed.