3D microstructures fabricated by partially opaque X-ray lithography masks

Citation
S. Cabrini et al., 3D microstructures fabricated by partially opaque X-ray lithography masks, MICROEL ENG, 53(1-4), 2000, pp. 599-602
Citations number
7
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
599 - 602
Database
ISI
SICI code
0167-9317(200006)53:1-4<599:3MFBPO>2.0.ZU;2-X
Abstract
X-ray lithography has several advantages over optical or e-beam techniques, since x-ray proximity printing can overcome typical limitations of such te chniques, enabling the imaging of ultra thick resist layers (micro-mechanic al application). In this work we will discuss the fabrication of a multilev el x-ray mask capable of producing a radiation dose modulation when used in a typical proximity x-ray lithography set-up. The aim of our investigation is to develop a process that in a single x-ray exposure can replicate a mu ltilevel mask profile. The mask was realised by e-beam lithography and made by a number of overlapped gold layers, so producing a modulation of the x- ray dose absorption. We describe in some detail the process for the fabrica tion of the mask and the first result of the x-ray exposure.