Nanostructuring of zone plates for helium atom beam focusing

Authors
Rehbein, S Doak, RB Grisenti, RE Schmahl, G Toennies, JP Woll, C
Citation
S. Rehbein et al., Nanostructuring of zone plates for helium atom beam focusing, MICROEL ENG, 53(1-4), 2000, pp. 685-688
Citations number
11
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
53
Issue
1-4
Year of publication
2000
Pages
685 - 688
Database
ISI
SICI code
0167-9317(200006)53:1-4<685:NOZPFH>2.0.ZU;2-J
Abstract
Free standing zone plates can be used to focus and monochromatize atom beam s. A method for manufacturing free-standing silicon zone plates is describe d. Zone plates with 100 nm and 50 nm outermost zone width have now been fab ricated with this method. The zone plates are designed for focusing a heliu m atom beam at thermal energy. The focal length of the first diffraction or der for a de Broglie wavelength of lambda(dB) = 0.09 nm is 300 mm. Initial measurements of the focusing properties of the zone plates have been made.