Micro displacement measurement with the axial response curve of fiber-optical confocal scanning microscope

Authors
Liu, I Yang, LS Wang, GY Xu, ZZ
Citation
I. Liu et al., Micro displacement measurement with the axial response curve of fiber-optical confocal scanning microscope, OPTIK, 111(7), 2000, pp. 315-317
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTIK
ISSN journal
00304026 → ACNP
Volume
111
Issue
7
Year of publication
2000
Pages
315 - 317
Database
ISI
SICI code
0030-4026(2000)111:7<315:MDMWTA>2.0.ZU;2-Q
Abstract
Based on the axial response curve of the fiber optical confocal scanning mi croscope. a non-contacting and non-interferometric technique for measuring micro displacements is developed. Using the technique, the converse piezoel ectric extension and contraction of a PZT was measured with resolution as g reat as 5 nm.