The interaction between a monokinetic and mass resolved low-energy gold clu
ster beam and a gold (111) surface is studied in detail at room temperature
by means of molecular dynamics. The model makes use of the classical secon
d moment tight-binding approximation to estimate the interatomic forces. A
model is described to account for the electron-phonon coupling. Clusters of
the nanometer size are modeled to slow down one after the other on the gol
d surface until a nanostructured layer about 7 nm thick is formed. The clus
ter slowing down is studied in detail and the consequences of the diffusion
less accumulation of clusters on the surface is investigated. The first imp
inging clusters undergo pronounced epitaxy with the substrate surface altho
ugh defects of various kinds can take place in them. The further cluster sl
owing down stimulates the annihilation of these defects. A pronounced surfa
ce roughness indicates no significant coalescence. As the slowing down proc
eeds further, cluster layers become increasingly defective and highly stres
sed. This stress field propagates into the first cluster layer, inducing la
ttice distortions. The memory of the surface orientation is progressively l
ost as the deposited layer thickness increases. The cluster assembled is ch
aracterized by numerous cavities of the nanometer size that may be intercon
nected and form nanopores. Incident conditions are found to play an importa
nt role, which motivates a realistic comparison between simulated and real
experiments.