Hammering out the details of full fab automation

Authors
Hurley, K
Citation
K. Hurley, Hammering out the details of full fab automation, SOL ST TECH, 2000, pp. S10
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Year of publication
2000
Supplement
S
Database
ISI
SICI code
0038-111X(200008):<S10:HOTDOF>2.0.ZU;2-6
Abstract
Foundry supplier Nanya Technology has implemented fab automation using auto matic guided vehicles, with an eye to eventual "lights-out" operations with 300mm wafers. The catch to this approach has been that 200mm tools, in gen eral, lack a standard approach to ACV interfacing. Nanya engineers, working with both major and specialized tool suppliers, have forced the automation needed using a standard IBM software platform.