Positrons are very sensitive probes for vacancy-type defects of atomic dime
nsions, e.g. vacancies, vacancy agglomerates, dislocations or inner surface
s. It is well established that positrons can be trapped at these defects an
d, because of the locally reduced electron density, the lifetime of the pos
itron localized at the defect increases. This lifetime has characteristic v
alues for each defect type and therefore it is possible to separate out var
ious atomic defect con figurations and their relative abundance with very h
igh sensitivity ( similar to 1 ppm) and in a nondestructive way. With a pul
sed positron beam ( similar to 3 mm diameter) of variable energy, lifetime
studies can be performed as a function of the positron energy and hence the
penetrations depth. Results on silicon and silicon carbide subjected to di
fferent treatments will be discussed. For many applications in materials sc
ience a positron beam in the micrometer range is desirable. This leads to a
scanning positron microscope consisting of a pulsed positron beam of micro
meter dimension with a scanning facility. The design and the performance of
this first system of its kind will be presented. (C) 2000 Elsevier Science
Ltd. All rights reserved.