Measurement of hydrogen and deuterium concentration in gold electroplated layer by glow discharge mass spectrometry

For the first time glow discharge mass spectrometry was applied to the anal ysis of hydrogen and deuterium content in micrometer thick gold layers elec troplated over CuSn substrate. A study of method feasibility for the thin m etallic layers was performed including evaluation of limit of detection, in strumental background, and reproducibility. Depth profiles of hydrogen and deuterium concentrations as ion beam ratios were successfully collected. Re lative sensitivity factor of hydrogen was evaluated by measurement of titan ium standard reference material. (C) 2000 The Electrochemical Society. S109 9-0062(00)06-040-5. All rights reserved.