Dynamic range improvement by narrow-channel effect suppression and smear reduction technologies in small pixel IT-CCD image sensors

Authors
Tanabe, A Kudoh, Y Kawakami, Y Masubuchi, K Kawai, S Yamada, T Morimoto, M Arai, K Hatano, K Furumiya, M Nakashiba, Y Mutoh, N Orihara, K Teranishi, N
Citation
A. Tanabe et al., Dynamic range improvement by narrow-channel effect suppression and smear reduction technologies in small pixel IT-CCD image sensors, IEEE DEVICE, 47(9), 2000, pp. 1700-1706
Citations number
8
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE TRANSACTIONS ON ELECTRON DEVICES
ISSN journal
00189383 → ACNP
Volume
47
Issue
9
Year of publication
2000
Pages
1700 - 1706
Database
ISI
SICI code
0018-9383(200009)47:9<1700:DRIBNE>2.0.ZU;2-Q
Abstract
Technologies for narrow-channel effect suppression in photodiodes (PDs) and vertical CCDs (V-CCDs) and for smear reduction in PDs have been developed in order to improve dynamic range in small pixel interline-transfer CCD (IT -CCD) image sensors, The new technologies have been applied to a progressiv e-scan IT-CCD image sensor with 5 mu m square pixels and have I) increased the charge handling capability of its V-CCDs to 4500 electrons/V; 2) improv ed its smear value to -95 dB; and 3) increased the saturation charge of its PDs to 2.3 x 10(4) electrons.