MSM photodetector with an integrated microlens array for improved optical coupling

Authors
Ozelo, HFB de Barros, LEM Nabet, B Neto, LG Romero, MA Ramos, ACS Swart, JW
Citation
Hfb. Ozelo et al., MSM photodetector with an integrated microlens array for improved optical coupling, MICROW OPT, 26(6), 2000, pp. 357-360
Citations number
8
Categorie Soggetti
Optics & Acoustics
Journal title
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
ISSN journal
08952477 → ACNP
Volume
26
Issue
6
Year of publication
2000
Pages
357 - 360
Database
ISI
SICI code
0895-2477(20000920)26:6<357:MPWAIM>2.0.ZU;2-W
Abstract
A novel technique to enhance the optical coupling efficiency of planar phot odetectors is described. It consists of the fabrication of an array of inte grated cylindrical microlenses on top of an MSM. Results show an 11% increa se in the photocurrent and it is demonstrated how total optical coupling ma y be achieved. (C) 2000 John Wiley & Sons, Inc.