We have developed a CCD calibration system using fluorescent X-ray lines wi
th energies ranging from 1.49 keV (Al K alpha) to 11.2 keV (Se Ka). The abs
olute X-ray flux is calibrated by a gas proportional counter, while the eme
rging spectra are monitored by solid-state silicon detectors. In order to s
uppress contaminating X-rays in the fluorescence spectra, mechanical collim
ators were set in the X-ray beam line, high-purity targets for fluorescent
lines were used, and band-pass filters were put on the X-ray beam line. As
for the purity of the fluorescent X-rays, the typical purity achieved was s
imilar to 98%. (C) 2000 Elsevier Science B.V. All rights reserved.