The silicon angular rate sensor system DAVED (R)

Authors
Geiger, W Merz, J Fischer, T Folkmer, B Sandmaier, H Lang, W
Citation
W. Geiger et al., The silicon angular rate sensor system DAVED (R), SENS ACTU-A, 84(3), 2000, pp. 280-284
Citations number
14
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
84
Issue
3
Year of publication
2000
Pages
280 - 284
Database
ISI
SICI code
0924-4247(20000901)84:3<280:TSARSS>2.0.ZU;2-U
Abstract
The angular rate sensor system DAVED(R) (Decoupled Angular Velocity Detecto r) is presented, which consists of a vacuum packaged sensor-die and a discr ete readout electronics delivering an analog output signal. The noise equiv alent rate in a 50 Hz bandwidth corresponds to 0.1 deg/s. The resolution is 0.008 deg/s and the bias stability over the temperature range of - 20 degr ees C to 70 degrees C is less than +/- 1.1 deg/s. The drift can be signific antly reduced by an improved readout electronics. (C) 2000 Elsevier Science S.A. All rights reserved.